VINSPECsolar WIS systems are designed for inspection of raw wafers, as the final step in wafer production or as first step in cell lines. There are different setups for visible light and infrared inspection. One system inspects geometrical properties, including edge irregularities and detects surface defects using visible light inspection for measurement and classification. The other system is dedicated to micro cracks using infrared light. Different versions are offered for on-the-fly or standstill handling. VINSPECsolar WIS inspects various formats of wafers with edge lengths of up to six inches (optionally eight inches) whether the cell structure is mono or multi crystalline. All VINSPECsolar systems have proven to be robust and reliable, with very little false detection.
Performance “visible light” wafer inspection: