PECVD System

For anti-reflective coating, a key process in solar cell production, centrotherm photovoltaics offers PECVD systems for the deposition of silicon nitride. Due to high availability, low downtime and low cost of ownership our PECVD systems suit perfectly for serial production. Besides, our product range contains low pressure systems with high process flexibility for anti-reflective coating in research and development.

  •     High availability due to redundancy
  •     High throughput and short cycle times due to optimized handling sequences
  •     Low total cost of ownership
  •     Direct plasma for highest efficiencies
  •     Excellent passivation characteristics due to control of hydrogen content
  •     Highest cleanness
  •     No periodic downtime (outside cleaning by boat etching)
     

Partners

Acknowledgements

Solar Media