Magnetically levitated turbomolecular pumps

  • Alcatel's ATH-M Maglev
    Alcatel's ATH-M Maglev

Adixen Maglev hybrid turbomolecular pumps - 500l/s to 3200 l/s - for coating, photovoltaic and other industrial applications. Adixen ATH-M hybrid magnetically levitated series turbo pumps are sophisticated high-performance, robust pumps recognized as the new standard  in the world of turbo-molecular vacuum pumps. The wide Adixen product range (500 to 3200 models) provides a comprehensive solution for the photovoltaic panel production industry.

Based on 35 years of turbo technology development, Alcatel has integrated the hybrid technology into the ATH-M series, optimizing the plant vacuum system solution by reducing the total Cost of Ownership (CoO).  Additionally, the robust ATH-M series has no scheduled bearing maintenance and high Mean Time Between Failure (MTBF).

The unique, compact design of the integrated controller provides easy pump integration to the fabrication tool with multiple controller communication protocol options (profibus, devicenet, ether4).

Furthermore, large production tools requiring multiple pump systems benefit from Adixen's communication network connecting a line of turbo and primary pumps in series, allowing control and supervision with a unique monitoring system, that can be integrated directly into the production tool.

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Acknowledgements

Solar Media