Lab CVD Reactor

The miniature version of the CVD reactor is an ideal analysis tool for silicon quality control. The reactor is also an excellent training tool for the CVD process. It is a very popular product as it is easy to use and highly automated.

  • Operating pressure according to execution: 0.3 - 0.7 barg or 1.0 - 7.0 barg
  • Trichlorosilane consumption: 20 kg/cycle
  • Duration of deposition process: 12 - 14 hours
  • Total duration of cycle: 16 hours



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