Gas Purification

Entegris GateKeeper® gas purifiers remove gaseous contaminants down to part-per-trillion levels with inorganic media. GateKeeper purifiers are a cost-effective way to prevent contamination of the process or damage to the tool. Designed for ambient operation and requiring no power, GateKeeper gas purifiers offer maximum flow rates ranging from 1 SLM to 20,000 SLM. Applications include gas-box installation, single-tool purification, multi-tool purification, facility purification, back-pad purifiers, Aeronex® gas purification system back-ups and other applications.



Solar Media