EKZ 3000

  • PVA Tepla's EKZ 3000

Compared to the crystal pulling equipment used until now, the concept and design of the 300mm plant signifies an important step in the technological development. In developing the plant, consideration was given to all knowledge gained to date and to the available know-how of our customers worldwide. These furnaces provide ideal conditions for meeting crystal quality requirements.

The batch weight in these 300mm (12") furnaces ranges up to 450kg of polysilicon, resulting in crystal lengths of almost 2.2m.

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Acknowledgements

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