Batch diffusion furnace

Due to high throughput and comparatively low cost of ownership centrotherm diffusion furnaces support the highest demands of serial crystalline solar cell production. The closed quartz tubes enable an ultra clean diffusion process that in combination with an easy realization of high emitter resistivities leads to an increase of efficiency. In addition to our standard systems for serial production we supply configurations for the purposes of research and development.

  •     Diffusion with phosphorus and boron (atmospheric and low pressure)
  •     Wet and dry oxidation
  •     Annealing
  •     4 or 5 stack configuration
  •     High availability due to redundancy
  •     High throughput and short cycle times due to optimized process flows
  •     Highest cleanness



Solar Media